Description
1. System Overview
| Category | Details |
|---|---|
| Product Name | CryoSAS – Cryogenic Silicon Analysis System |
| Purpose | Low-temperature impurity analysis of silicon |
| Operating Temperature | < 15 K |
| Environment | Industrial, high-throughput semiconductor production |
| Spectrometer Type | Bruker FT-IR integrated system |
2. Key Performance Features
| Feature | Details |
|---|---|
| Shallow Impurity Detection | Boron, Phosphorus → low ppta levels (ASTM/SEMI MF1630) |
| Carbon & Oxygen Detection | Low ppba levels (ASTM/SEMI MF1391) |
| Spectral Range | 1500–280 cm⁻¹ (optimized for impurity detection) |
| Detection Limits (typ.) | Phosphorus: 10 ppta Boron: 30 ppta Carbon: 20 ppba |
| Sample Type | Single crystal silicon, ~3 mm wedged samples |
| Reporting | Automated analysis & results reporting |
3. Cooling & Vacuum System
| Component | Details |
|---|---|
| Cooling System | Built-in closed-cycle cryo-cooler (no liquid helium required) |
| Cost Savings | ~€50,000 per year vs. liquid helium systems |
| Vacuum System | Turbodrag pump + dry fore pump |
| Control | Fully automated PLC-controlled vacuum & cooling |
4. Sample Handling & Hardware Design
| Feature | Details |
|---|---|
| Sample Chamber | Stainless-steel, large access area |
| Sample Holder | Automated 9-position holder |
| Material | Gold-coated OFHC copper for uniform cooling |
| Positioning | Precision stepper motor, high torque, durable translation stage |
5. Software & Ease of Use
| Category | Details |
|---|---|
| User Interface | Touch-screen, industrial QC-focused |
| Automation | Cooling, measurement, evaluation, reporting |
| User Skill Requirement | No spectroscopy or vacuum expertise needed |
| Workflow | Select method → enter sample info → press start → automatic processing |
6. Industrial Benefits
| Benefit | Details |
|---|---|
| High Throughput | Automated multi-sample handling |
| Reliability | Proven hardware, stable cryogenic operation |
| Low Operating Cost | No liquid helium; minimal maintenance |
| Consistent Results | Optimized for repetitive QC workflows |
